Getter Pump Insi torr "Fast Pump"
It is a ultra-high vacuum pump based on non-evaporable getter (NEG) technology.
The Getter Pump "Insi Torr Fast Pump" is an ultra-high vacuum pump based on the non-evaporative getter NEG technology developed by the Saes Group. This pump was developed for Applied Materials' PVD and aluminum sputtering processes. The development of this pump significantly reduces the time it takes for the chamber to vent and return to operation. 【Features】 - By installing the in-situ fast pump inside the chamber, downtime is reduced from 11 hours to 7 hours. - Can be retrofitted to existing equipment. - Enhances upgrading without affecting the footprint. - Does not negatively impact particle characteristics or film properties. For more details, please contact us or download the catalog.
- Company：アップ・テック・ジャパン
- Price：Other
